Natural gas jargon. The gases used in the semiconductor industry are collectively referred to as electronic gases. It can be divided into three categories: pure gas, pure gas and semiconductor special material gas. Special material gas is mainly used in epitaxy, doping and etching process. High purity gas is mainly used as dilution gas and carrier gas. Electron gas is an important branch of special gas. Electronic gases can be classified into electronic, LSI (large scale integrated circuit), VLSI (very large scale integrated circuit) and ULSI (very large scale circuit) grades depending on their purity and use.

High quality electronic gas is an indispensable basic material for the development of integrated circuit, optoelectronics and microelectronics technology, especially in the manufacturing process of VLSI, LCD devices, semiconductor lamps and semiconductor materials. It has been called the "blood" and "grain" of the electronics industry. Its purity and cleanliness directly affect the quality, integration, specific technical indicators and output of optoelectronic and microelectronic components, and fundamentally limit the accuracy and accuracy of circuits and devices.

In recent years, with the rapid development of ultra large scale integrated circuit, flat panel display, photovoltaic power generation and other industries, the market demand of electronic gas increases greatly, and the localization of special electronic gas has become an inevitable trend. It is obvious that China has made gratifying progress in localization: domestic high purity ammonia has changed the market monopoly pattern of foreign natural gas companies, the "valuable but unavailable" era of high purity hydrogen tetrafluoride is over, and high purity hydrogen chloride has successfully opened the domestic market.